Axetris Mass Flow Controller MFC 2022


Small ultra compact mass flow controller module with RS-232 EIA and analog 0...5 V interface, based on the propertiarie Platinium MEMS technology from Axetris (MEMS: Micro Electro- Mechanical System). It offers the following advantages

  • Ultra compact size
  • Fast settling time 150 ms
  • Excellent repeatability and accuracy
  • Rigid stable design
  • High turn down ratio > 1000:1
  • High long term stability

It is recommended for system integration in Industrial, Analytical and Medical applications


  • Platinum based MEMS technology
  • High accuracy and stability
  • Ultra-fast response and settling time
  • Excellent repeatability and reproducibility
  • Ultra compact size
  • High dynamic range up to 1000:1
  • Flow range zooming (optional)
Axetris Mass Flow Controller MFC 2022