Low Flow Flowmeter

• Accuracy of +/- 1% of full scale
• Accuracy of +/- 0.7% of reading +.3% of FS
• 316 stainless steel construction
• Flow ranges from 0 to 10 sccm to 0 to 1000 slpm.
• Fast-response control valve
• True digital performance with great flexibility
• “Primary Standard” calibration& NIST traceability
• Dial-A-Gas® Technology
• 10 pre-programmed gases come standard
• Substitute up to 9 gases of your own
  More>>

The Smart-Trak is our flagship mass flow meter and controller. Smart-Trak has demonstrated that premium flow instruments do not have to be hard to use. This combination of convenience with un-matched performance and flexibility has earned the 100 Series awards and praise as one of the finest MFC's in the world. Smart-Trak is the culmination of a massive three year development effort that has created a higher standard of performance for gas flow instruments into the future.

Smart-Trak is designed so the physics are correct! Excellent accuracy and reliability coupled with unsurpassed instrument stability result from a patented, inherently linear design, advanced platinum sensor technology, and a valve that is strong, flexible, and forgiving. Smart-Trak features Dial-A-Gas® Multiple Gas capability so that one single unit may be used with up to 10 gases. The 100 Series is constructed entirely from 316 Stainless Steel, so it can be used with any clean gas including toxics, corrosives, combustibles, and even mixtures of these. The unique Pilot Module replaces expensive control/readout boxes and is available mounted to the face of the instrument or in a convenient hand-held remote version.

Features

• For flow rates up to 120 ml/min (hydrocarbons)
• Highest sensitivity down to the lowest flow rates
• Fast response time down to 30 ms
• RS485 digital interface
• For photoresists and solvents
• Straight flow path, no moving parts
• Assured purity
• Superb chemical resistance, inert materials
• Wetted materials: PCTFE, PFA and quartz glass only
• Maximum working pressure 3 bar (high pressure ratings available on request)

The liquid flow sensor SLQ-QT105 measures flow rates of less than 2 cc/sec (120 ml/min) of hydrocarbon-based liquids such as photoresists and solvents. Designed for use in high-purity fluid handling applications in the semiconductor, PV and flat panel display industries, the liquid flow sensor features a short measurement response time of approximately 40 ms and very high sensitivity for flow rates down to 0.05 cc/sec (3 ml/min). Detection of air bubbles in the microliter range is also possible.

Flow is measured without moving parts and non-invasively through the wall of a straight flow path. All wetted materials are made from Teflon® or quartz glass. The compact, lightweight device is equipped with fittings for 4x3mm PFA tubing. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.

The SLQ-QT105 opens new perspectives for high-purity process control by remedying the shortage of precise, reliable, fast and inexpensive sensors for flow rates in the low milliliter range. Mechanical solutions, such as small paddlewheels and ultrasonic flow meters, are often unable to fulfill requirements due to their slow response, problems with bubbles, and inability to measure flow rates below 100 ml/min repeatability. With the SLQ-QT105, the advantages of CMOSens® Technology are now available for the first time for use in high-end semiconductor applications.