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Mass Flow Controller (MFC)
Brooks Mass Flow Controller
Mass Flow Controllers (MFCs) are used wherever accurate measurement and control of a mass flow of gas is required independent of flow pressure change and temperature change in a given range. Mass Flow Meters (MFMs) are used wherever accurate measurement of gas is required without control of the flow, which is done by another device. To help understand how an MFC works, it can be separated into 4 main components: a bypass, a sensor, an electronics board and a regulating valve:
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(credits: Qualiflow Inc.)
Featured Suppliers
Brooks Instrument
The Brooks line of digital thermal mass flow meters and controllers offers faster response, better accuracy and improved control over traditional analog devices. Features include: industry leading repeatability ensures a stable process even under changing conditions; self diagnostics and alarms eliminate downtime; multiple communication protocols allow easy integration into many control systems; elastomer seals option provides exceptional leak integrity and maximizes control valve shutoff dependability; ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes. Available with traditional analog or digital I/O. Globally approved for a variety of service areas. In addition to digital devices, the Brooks line of analog thermal mass flow meters and controllers is available to meet the rigorous demands of our customers’ established and newly developing process applications. These devices continue to add to their expansive installed base due to their fast response, excellent accuracy, and simple integration.
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Brooks Mass Flow Controller
Sierra Instruments, Inc.
Our 100 Series family of mass flow controllers are one of our finest technical achievements in over 35 years in the mass flow instrumentation business. Our 100 Series is designed so the physics are correct! Our 100 Series Premium Digital family is made up of our flagship Smart-Trak® Model 100 , our highly engineered ultra-low flow solution Micro-Trak™ Model 101 and our NEMA 6 & IP67 industrial MFC, the Max-Trak™ Model 180 . Excellent accuracy and repeatability coupled with unsurpassed instrument stability result from a patented, inherently linear design, advanced platinum sensor technology, and a valve that is strong, flexible and forgiving. Our 100 Series family of instruments has raised the bar and set a higher standard in the Performance MFC marketplace.
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Smart-Trak® Model 100 Mass Flow Meters and Controllers
Bronkhorst High-Tech
Bronkhorst High-Tech B.V., established in 1981, offers the most extensive product range of thermal mass flow meters and controllers on the market. Numerous styles of both standard and bespoke instruments can be offered for applications in laboratory, industrial and hazardous areas.
The full scale measuring range (with 50:1 turn-down) for these instruments can be selected between 0-1 mln/min and 0-10000 m3n/h for gases and 0-30 mg/h up to 0-20 kg/h for liquids.

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Mass Flow Controller
Featured Products
Brooks: Digital Mass Flow Meters & Controllers
Digital Mass Flow Meters & Controllers

Digital Mass Flow Meters & Controllers
The Brooks® line of digital thermal mass flow instruments offers faster response, better accuracy and improved control over traditional analog devices.

  • Industry leading repeatability ensures a stable process even under changing conditions
  • Self diagnostics and alarms eliminate downtime
  • Multiple communication protocols allow easy integration into many control systems
  • Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability
  • Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes
  • Available with traditional analog or digital I/O
  • Globally approved for a variety of service areas
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Smart-Trak® Model 100 Mass Flow Meters and Controllers
Smart-Trak® Model 100 Mass Flow Meters and Controllers
  • Accuracy of +/- 1% of full scale
  • Accuracy of +/- 0.7% of reading +.3% of FS
  • 316 stainless steel construction
  • Flow ranges from 0 to 10 sccm to 0 to 1000 slpm.
  • Fast-response control valve
  • True digital performance with great flexibility
  • “Primary Standard” calibration& NIST traceability
  • Dial-A-Gas® Technology
  • 10 pre-programmed gases come standard
  • Substitute up to 9 gases of your own
  • Unique pilot module allows these control functions:

The Smart-Trak is our flagship mass flow meter and controller. Smart-Trak has demonstrated that premium flow instruments do not have to be hard to use. This combination of convenience with un-matched performance and flexibility has earned the 100 Series awards and praise as one of the finest MFC's in the world. Smart-Trak is the culmination of a massive three year development effort that has created a higher standard of performance for gas flow instruments into the future.

Smart-Trak is designed so the physics are correct! Excellent accuracy and reliability coupled with unsurpassed instrument stability result from a patented, inherently linear design, advanced platinum sensor technology, and a valve that is strong, flexible, and forgiving. Smart-Trak features Dial-A-Gas® Multiple Gas capability so that one single unit may be used with up to 10 gases. The 100 Series is constructed entirely from 316 Stainless Steel, so it can be used with any clean gas including toxics, corrosives, combustibles, and even mixtures of these. The unique Pilot Module replaces expensive control/readout boxes and is available mounted to the face of the instrument or in a convenient hand-held remote version.

Bronkhorst: µ-FLOW Mass Flow Controller
Bronkhorst: ?-FLOW Mass Flow Controller
  • No moving parts
  • Thru-Flow measurement
  • Attitude insensitive
  • Fast and accurate measurement
  • Negligible dead-volume
  • In combination with a control valve: continuous and stable control
  • Analog or digital: RS232, Profibus-DP®, DeviceNetTM, Modbus or FLOW-BUS
  • Stainless Steel sensor; on request: PEEKTM, Fused Silica
MFC Principle

MFC PRINCIPLES

Mass Flow Controllers (MFCs) are used wherever accurate measurement and control of a mass flow of gas is required independent of flow pressure change and temperature change in a given range. Mass Flow Meters (MFMs) are used wherever accurate measurement of gas is required without control of the flow, which is done by another device. To help understand how an MFC works, it can be separated into 4 main components: a bypass, a sensor, an electronics board and a regulating valve:

The bypass, the sensor, and one part of the electronics board are the measurement side of the mass-flow controller and make a Mass Flow Meter. The regulating valve and the other part of the electronics board are the controlling side of the mass-flow controller and exist only on a Mass-Flow Controller. So every Mass-Flow Controller includes a Mass-Flow Meter.

MEASUREMENT PRINCIPLES

The flow is divided between a heated sensing tube (the sensor), where the mass flow is actually measured, and a flow restrictor or bypass, where the majority of flow passes. The bypass is designed in a way that flow thru the sensor and the bypass is always proportional to the flow range for which the mass-flow controller is built. The sensor is designed to deliver an output voltage almost proportional to the gas flow circulating thru it, which is due to the bypass design being proportional to the total flow circulating thru the mass-flow meter or controller. The electronics board amplifies and linearizes the sensor signal so the output of the+ electronics board, named ?readout?, gives a signal proportional to the total flow circulating thru the mass-flow meter or controller. Most of the time this signal is a 0-5 V signal; 0 volts indicating ?no flow?, 5 volts indicating full scale flow of the device. Full scale is the maximum flow for which the mass-flow controller is designed and calibrated to work with at high accuracy. This information is always written on stickers, which are on the top of the cover and the side of the mass-flow stainless steel base. Also written on the sticker is the gas for which the mass-flow controller is calibrated.

Why use a bypass? Because the sensor element can only measure small flow (typically 5 sccm), the bypass/restrictor allows the controller to control and measure greater amounts of flow. On a 5 sccm full scale mass-flow controller, there is no bypass, all of the gas would flow thru the sensor. On a 100 sccm full scale mass-flow controller, the bypass is adjusted so that when 100 sccm flows thru the controller, 5 sccm will flow thru the sensor tube and 95 sccm will flow thru the bypass.

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Flowmeters Related products
» Flowmeter Rental
» Static Mixers
» Refurbished Flow meter
» Watercut meters
» Flow Sensors
» Flow nozzles
» Flow Straighteners / Conditioners
» Crude Oil Mixing /
Custody Transfer
» Leak Detection
» Air Eliminators
» Automatic Meter Reading
» Batching / Bulk meters
» Flow Switches
» Flow Software
» Flowmeter Indicators Panels
» Flow Computers
» Flow Data Logger
» Flow Control
» Fuel Flow measurement
» High Temperature
Flow meters
» Hydraulic Flowmeters
» Micro Flowmeter
» Paddle Wheel
» Peak Flowmeter
» Sight Glass /
Sight Flow Indicator
» Ultrapure Flowmeters
» Water Meters
» Wind Meters
References
» Dielectric Constants of Common Materials
» Glossary of Industry Terms
for Natural Gas
» Sensor Glossary Terminology
» Lubrication Terminology
» Maritime Flow and
Accuracy terms
» Hazardous area definitions
» Technical Glossary :
Hydrology Terms
» Technical Glossary : A-Z
» Meteorology Terms
» Coastal Terminology
» Water Terminology
» WasteWater Terminology
» Oil and Gas Terms
» Free Flow calculators and calculation software
» Maritime Glossary
» Some Oil Well Terminology
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