• Accuracy of +/- 1% of full scale
• Accuracy of +/- 0.7% of reading +.3% of FS
• 316 stainless steel construction
• Flow ranges from 0 to 10 sccm to 0 to 1000 slpm.
• Fast-response control valve
• True digital performance with great flexibility
• “Primary Standard” calibration& NIST traceability
• Dial-A-Gas® Technology
• 10 pre-programmed gases come standard
• Substitute up to 9 gases of your own

The Smart-Trak is our flagship mass flow meter and controller. Smart-Trak has demonstrated that premium flow instruments do not have to be hard to use. This combination of convenience with un-matched performance and flexibility has earned the 100 Series awards and praise as one of the finest MFC's in the world. Smart-Trak is the culmination of a massive three year development effort that has created a higher standard of performance for gas flow instruments into the future.

Smart-Trak is designed so the physics are correct! Excellent accuracy and reliability coupled with unsurpassed instrument stability result from a patented, inherently linear design, advanced platinum sensor technology, and a valve that is strong, flexible, and forgiving. Smart-Trak features Dial-A-Gas® Multiple Gas capability so that one single unit may be used with up to 10 gases. The 100 Series is constructed entirely from 316 Stainless Steel, so it can be used with any clean gas including toxics, corrosives, combustibles, and even mixtures of these. The unique Pilot Module replaces expensive control/readout boxes and is available mounted to the face of the instrument or in a convenient hand-held remote version.

Brooks QUANTIM family of products are the smallest lowest flow Coriolis meters and controllers available on the market. With a footprint the size of a handheld organizer, you can fit this instrument into any tight space. With a range of 0.001 to more than 40 kg/hr, you can measure mass or volume flow and density or temperature for drops of liquid, slurries, or gas. QUANTIM offers unsurpassed accuracy and unmatched zero stability in demanding low flow applications.

QUANTIM provides precision mass flow measurement, integral control, on line density and temperature measurement all in one compact package. The heart of the device is a patented Coriolis sensor design which measures low flows independent of the fluid type or process variables. This provides you with unsurpassed performance in even the most challenging low flow applications.

Most critical processes require control as well as measurement, therefore QUANTIM offers an optional integrally mounted, in-line control valve. No remote electronics are required as all the transmitting and control electronics are contained within the product housing. Available with a variety of options and global approvals the Brooks QUANTIM meters and controllers provide unsurpassed performance, solving specific challenges in demanding low-flow applications.

Digital Mass Flow Meters and Controllers for gases of Bronkhorst’s EL-FLOW Select series offer greater flexibility for user selection of both flow ranges and gas types. As a result of their optional ‘Multi Fluid Multi Range’ feature in combination with a high rangeability, equipment manufacturers (OEMs) are able to drastically reduce the variety of spare instruments they keep on stock and thus reduce the cost of ownership. Users of MFCs in pilot plants or laboratories can rescale their instruments on site, saving time and money for dismounting and recalibration. For the convenience of the user, Bronkhorst High-Tech has developed a free software tool called FlowTune. By hooking up the instrument to the RS232 port of a lap-top and running this freeware configuration tool, the selection of different flow ranges is very easy.

The instruments cover flow ranges from 0…1 mln/min up to 0…1670 ln/min (Air-equivalent). In addition to the standard analog I/O-signals and the RS232 connection, there is the possibility of integrating an interface board with DeviceNet, Profibus-DP, Modbus or FLOW-BUS protocol.

Features

• High accuracy Mass Flow Controller (0.8% of set point for 10 – 100% FS)
• Ultra fast settling time (<100ms to within 2% of setpoint)
• CMOSens technology
• Analog interface (0-5Vdc)
• Unipolar Power Supply (14 to 24 Vdc)
• Down-mount, VCR, VCO fittings
• Digitally calibrated & temperature compensated
• NIST traceable calibration

The CMOSens® SFC4000 mass flow controller enables the very fast and accurate control of gas flows over a very wide range. Its leading performance is based on Sensirion’s unsurpassed CMOSens® sensor technology which combines a high precision sensor element with the amplification and A/D converter circuit on one single CMOS chip. The digital calibrated and temperature compensated sensor signal is converted directly on the CMOSens® chip into a PWM signal which is used in a fast analog controlling circuit to control the valve. This results in very high accuracy, fast settling time and large dynamic range.

I show you the lowest cost data acquisition system for logging the flow over time of Sierra mass flow meters or Sierra mass flow controllers. The beauty of the system is it is less than $100 and outputs the data to Excel and allows the user to set the start time and it will automatically turn off after it gathers all the data.

MFC PRINCIPLES

Mass Flow Controllers (MFCs) are used wherever accurate measurement and control of a mass flow of gas is required independent of flow pressure change and temperature change in a given range. Mass Flow Meters (MFMs) are used wherever accurate measurement of gas is required without control of the flow, which is done by another device. To help understand how an MFC works, it can be separated into 4 main components: a bypass, a sensor, an electronics board and a regulating valve:

The bypass, the sensor, and one part of the electronics board are the measurement side of the mass-flow controller and make a Mass Flow Meter. The regulating valve and the other part of the electronics board are the controlling side of the mass-flow controller and exist only on a Mass-Flow Controller. So every Mass-Flow Controller includes a Mass-Flow Meter.

MEASUREMENT PRINCIPLES

The flow is divided between a heated sensing tube (the sensor), where the mass flow is actually measured, and a flow restrictor or bypass, where the majority of flow passes. The bypass is designed in a way that flow thru the sensor and the bypass is always proportional to the flow range for which the mass-flow controller is built. The sensor is designed to deliver an output voltage almost proportional to the gas flow circulating thru it, which is due to the bypass design being proportional to the total flow circulating thru the mass-flow meter or controller. The electronics board amplifies and linearizes the sensor signal so the output of the+ electronics board, named ?readout?, gives a signal proportional to the total flow circulating thru the mass-flow meter or controller. Most of the time this signal is a 0-5 V signal; 0 volts indicating ?no flow?, 5 volts indicating full scale flow of the device. Full scale is the maximum flow for which the mass-flow controller is designed and calibrated to work with at high accuracy. This information is always written on stickers, which are on the top of the cover and the side of the mass-flow stainless steel base. Also written on the sticker is the gas for which the mass-flow controller is calibrated.

Why use a bypass? Because the sensor element can only measure small flow (typically 5 sccm), the bypass/restrictor allows the controller to control and measure greater amounts of flow. On a 5 sccm full scale mass-flow controller, there is no bypass, all of the gas would flow thru the sensor. On a 100 sccm full scale mass-flow controller, the bypass is adjusted so that when 100 sccm flows thru the controller, 5 sccm will flow thru the sensor tube and 95 sccm will flow thru the bypass.

Read full document >>