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Fluid Indication and Control |
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| Mass
Flow Controller (MFC) |
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Mass Flow Controllers
(MFCs) are used wherever accurate measurement and
control of a mass flow of gas is required independent
of flow pressure change and temperature change in
a given range. Mass Flow Meters (MFMs) are used
wherever accurate measurement of gas is required
without control of the flow, which is done by another
device. To help understand how an MFC works, it
can be separated into 4 main components: a bypass,
a sensor, an electronics board and a regulating
valve:
Learn more>>
(credits: Qualiflow Inc.) |
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| Featured
Suppliers |
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Our 100 Series family of mass flow controllers
are one of our finest technical achievements in
over 35 years in the mass flow instrumentation
business. Our 100 Series is designed so the physics
are correct! Our 100 Series Premium Digital family
is made up of our flagship Smart-Trak® Model
100 , our highly engineered ultra-low flow solution
Micro-Trak™ Model 101 and our NEMA 6 &
IP67 industrial MFC, the Max-Trak™ Model
180 . Excellent accuracy and repeatability coupled
with unsurpassed instrument stability result from
a patented, inherently linear design, advanced
platinum sensor technology, and a valve that is
strong, flexible and forgiving. Our 100 Series
family of instruments has raised the bar and set
a higher standard in the Performance MFC marketplace.
More
Details>> |
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The Brooks Quantim® Coriolis mass flow meter and mass flow controller provide precision mass flow measurement, integral control, on-line density and temperature measurement all in one compact package.The heart of the device is a patented Coriolis sensor design which measures low flows independent of the fluid type or process variables. This provides you with unsurpassed performance, repeatable mass flow measurement and control even under changing conditions. Brooks Quantim products are the smallest, lowest flow Coriolis meters and controllers available on the market. With a footprint the size of a handheld organizer, you can fit this instrument into any tight space..
More
Details>>
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All CMOSens® mass flow controllers (MFC) offer fast and accurate control of gas flows over a very wide range. The overall performance of a MFC depends mainly on the mass flow sensor used in it. The leading performance of Sensirion MFC is based on Sensirion’s unsurpassed CMOSens® sensor technology which combines a high precision sensor element with the amplification and A/D converter circuit on one single CMOS chip.
The digital, calibrated and temperature compensated sensor signal is converted directly on the CMOSens® chip into a signal which is used in the analog or digital controlling circuits to control the valve. This results in very high accuracy (0.8% mv), fast settling time (< 150 ms) and large dynamic range.
CMOsens® mass flow controllers are highly suitable for a variety of applications like dry etching, surface coating, gas mixing, gas analysis, and many others.
More» |
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Bronkhorst
High-Tech B.V., established in 1981, offers the
most extensive product range of thermal mass flow
meters and controllers on the market. Numerous
styles of both standard and bespoke instruments
can be offered for applications in laboratory,
industrial and hazardous areas.
The full scale measuring range (with 50:1 turn-down)
for these instruments can be selected between
0-1 mln/min and 0-10000 m3n/h for gases and 0-30
mg/h up to 0-20 kg/h for liquids.
More» |
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| Featured
Products |
| Smart-Trak® Model
100 Mass Flow Meters and Controllers |
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- Accuracy of +/- 1% of full scale
- Accuracy of +/- 0.7% of reading +.3% of FS
- 316 stainless steel construction
- Flow ranges from 0 to 10 sccm to 0 to 1000 slpm.
- Fast-response control valve
- True digital performance with great flexibility
- “Primary Standard” calibration&
NIST traceability
- Dial-A-Gas® Technology
- 10 pre-programmed gases come standard
- Substitute up to 9 gases of your own
More>>
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The Smart-Trak is our flagship
mass flow meter and controller. Smart-Trak has demonstrated
that premium flow instruments do not have to be hard
to use. This combination of convenience with un-matched
performance and flexibility has earned the 100 Series
awards and praise as one of the finest MFC's in the
world. Smart-Trak is the culmination of a massive three
year development effort that has created a higher standard
of performance for gas flow instruments into the future.
Smart-Trak is designed so the physics are correct!
Excellent accuracy and reliability coupled with unsurpassed
instrument stability result from a patented, inherently
linear design, advanced platinum sensor technology,
and a valve that is strong, flexible, and forgiving.
Smart-Trak features Dial-A-Gas® Multiple Gas capability
so that one single unit may be used with up to 10 gases.
The 100 Series is constructed entirely from 316 Stainless
Steel, so it can be used with any clean gas including
toxics, corrosives, combustibles, and even mixtures
of these. The unique Pilot Module replaces expensive
control/readout boxes and is available mounted to the
face of the instrument or in a convenient hand-held
remote version. |
| Brooks® QUANTIM® Coriolis mass flow meter |
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Brooks QUANTIM family of products are the smallest lowest flow Coriolis meters and controllers available on the
market. With a footprint the size of a handheld organizer, you can fit this instrument into any tight space. With a
range of 0.001 to more than 40 kg/hr, you can measure mass or volume flow and density or temperature for drops
of liquid, slurries, or gas. QUANTIM offers unsurpassed accuracy and unmatched zero stability in demanding low
flow applications.
QUANTIM provides precision mass flow measurement, integral control, on line density and temperature
measurement all in one compact package. The heart of the device is a patented Coriolis sensor design which
measures low flows independent of the fluid type or process variables. This provides you with unsurpassed
performance in even the most challenging low flow applications.
Most critical processes require control as well as measurement, therefore QUANTIM offers an optional integrally
mounted, in-line control valve. No remote electronics are required as all the transmitting and control electronics are
contained within the product housing.
Available with a variety of options and global approvals the Brooks QUANTIM meters and controllers provide
unsurpassed performance, solving specific challenges in demanding low-flow applications.
More>> |
| Bronkhorst: µ-FLOW
Mass Flow Controller |
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- No moving parts
- Thru-Flow measurement
- Attitude insensitive
- Fast and accurate measurement
- Negligible dead-volume
- In combination with a control valve: continuous
and stable control
- Analog or digital: RS232, Profibus-DP®, DeviceNetTM,
Modbus or FLOW-BUS
- Stainless Steel sensor; on request: PEEKTM, Fused
Silica
More>>
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| Sensirion : SFC4000 Ultra-Fast CMOSens® Mass Flow Controller for Gases |
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Features
- High accuracy Mass Flow Controller (0.8% of set point for 10 – 100% FS)
- Ultra fast settling time (<100ms to within 2% of setpoint)
- CMOSens technology
- Analog interface (0-5Vdc)
- Unipolar Power Supply (14 to 24 Vdc)
- Down-mount, VCR, VCO fittings
- Digitally calibrated & temperature compensated
- NIST traceable calibration
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The CMOSens® SFC4000 mass flow controller enables the very fast and accurate control of gas flows over a very wide range. Its leading performance is based on Sensirion’s unsurpassed CMOSens® sensor technology which combines a high precision sensor element with the amplification and A/D converter circuit on one single CMOS chip. The digital calibrated and temperature compensated sensor signal is converted directly on the CMOSens® chip into a PWM signal which is used in a fast analog controlling circuit to control the valve. This results in very high accuracy, fast settling time and large dynamic range.
More>> |
| MFC Principle |
MFC PRINCIPLES
Mass Flow Controllers (MFCs) are used wherever accurate
measurement and control of a mass flow of gas is required
independent of flow pressure change and temperature
change in a given range. Mass Flow Meters (MFMs) are
used wherever accurate measurement of gas is required
without control of the flow, which is done by another
device. To help understand how an MFC works, it can
be separated into 4 main components: a bypass, a sensor,
an electronics board and a regulating valve:

The bypass, the sensor, and one part of the electronics
board are the measurement side of the mass-flow controller
and make a Mass Flow Meter. The regulating valve and
the other part of the electronics board are the controlling
side of the mass-flow controller and exist only on a
Mass-Flow Controller. So every Mass-Flow Controller
includes a Mass-Flow Meter.
MEASUREMENT PRINCIPLES
The flow is divided between a heated sensing tube
(the sensor), where the mass flow is actually measured,
and a flow restrictor or bypass, where the majority
of flow passes. The bypass is designed in a way that
flow thru the sensor and the bypass is always proportional
to the flow range for which the mass-flow controller
is built. The sensor is designed to deliver an output
voltage almost proportional to the gas flow circulating
thru it, which is due to the bypass design being proportional
to the total flow circulating thru the mass-flow meter
or controller. The electronics board amplifies and linearizes
the sensor signal so the output of the+ electronics
board, named ?readout?, gives a signal proportional
to the total flow circulating thru the mass-flow meter
or controller. Most of the time this signal is a 0-5
V signal; 0 volts indicating ?no flow?, 5 volts indicating
full scale flow of the device. Full scale is the maximum
flow for which the mass-flow controller is designed
and calibrated to work with at high accuracy. This information
is always written on stickers, which are on the top
of the cover and the side of the mass-flow stainless
steel base. Also written on the sticker is the gas for
which the mass-flow controller is calibrated.
Why use a bypass? Because the sensor element can only
measure small flow (typically 5 sccm), the bypass/restrictor
allows the controller to control and measure greater
amounts of flow. On a 5 sccm full scale mass-flow controller,
there is no bypass, all of the gas would flow thru the
sensor. On a 100 sccm full scale mass-flow controller,
the bypass is adjusted so that when 100 sccm flows thru
the controller, 5 sccm will flow thru the sensor tube
and 95 sccm will flow thru the bypass.
Read
full document >> |
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Types of Flowmeters |
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