Digital Mass Flow Meters & Controllers
The Brooks® line of digital thermal mass flow instruments offers faster response, better accuracy and improved control over traditional analog devices.

• Industry leading repeatability ensures a stable process even under changing conditions
• Self diagnostics and alarms eliminate downtime
• Multiple communication protocols allow easy integration into many control systems
• Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability
• Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes
• Available with traditional analog or digital I/O
• Globally approved for a variety of service areas
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• Accuracy of +/- 1% of full scale
• Accuracy of +/- 0.7% of reading +.3% of FS
• 316 stainless steel construction
• Flow ranges from 0 to 10 sccm to 0 to 1000 slpm.
• Fast-response control valve
• True digital performance with great flexibility
• “Primary Standard” calibration& NIST traceability
• Dial-A-Gas® Technology
• 10 pre-programmed gases come standard
• Substitute up to 9 gases of your own
• Unique pilot module allows these control functions:

The Smart-Trak is our flagship mass flow meter and controller. Smart-Trak has demonstrated that premium flow instruments do not have to be hard to use. This combination of convenience with un-matched performance and flexibility has earned the 100 Series awards and praise as one of the finest MFC's in the world. Smart-Trak is the culmination of a massive three year development effort that has created a higher standard of performance for gas flow instruments into the future.

Smart-Trak is designed so the physics are correct! Excellent accuracy and reliability coupled with unsurpassed instrument stability result from a patented, inherently linear design, advanced platinum sensor technology, and a valve that is strong, flexible, and forgiving. Smart-Trak features Dial-A-Gas® Multiple Gas capability so that one single unit may be used with up to 10 gases. The 100 Series is constructed entirely from 316 Stainless Steel, so it can be used with any clean gas including toxics, corrosives, combustibles, and even mixtures of these. The unique Pilot Module replaces expensive control/readout boxes and is available mounted to the face of the instrument or in a convenient hand-held remote version.

• No moving parts
• Thru-Flow measurement
• Attitude insensitive
• Fast and accurate measurement
• Negligible dead-volume
• In combination with a control valve: continuous and stable control
• Analog or digital: RS232, Profibus-DP®, DeviceNetTM, Modbus or FLOW-BUS
• Stainless Steel sensor; on request: PEEKTM, Fused Silica

MFC PRINCIPLES

Mass Flow Controllers (MFCs) are used wherever accurate measurement and control of a mass flow of gas is required independent of flow pressure change and temperature change in a given range. Mass Flow Meters (MFMs) are used wherever accurate measurement of gas is required without control of the flow, which is done by another device. To help understand how an MFC works, it can be separated into 4 main components: a bypass, a sensor, an electronics board and a regulating valve:

The bypass, the sensor, and one part of the electronics board are the measurement side of the mass-flow controller and make a Mass Flow Meter. The regulating valve and the other part of the electronics board are the controlling side of the mass-flow controller and exist only on a Mass-Flow Controller. So every Mass-Flow Controller includes a Mass-Flow Meter.

MEASUREMENT PRINCIPLES

The flow is divided between a heated sensing tube (the sensor), where the mass flow is actually measured, and a flow restrictor or bypass, where the majority of flow passes. The bypass is designed in a way that flow thru the sensor and the bypass is always proportional to the flow range for which the mass-flow controller is built. The sensor is designed to deliver an output voltage almost proportional to the gas flow circulating thru it, which is due to the bypass design being proportional to the total flow circulating thru the mass-flow meter or controller. The electronics board amplifies and linearizes the sensor signal so the output of the+ electronics board, named ?readout?, gives a signal proportional to the total flow circulating thru the mass-flow meter or controller. Most of the time this signal is a 0-5 V signal; 0 volts indicating ?no flow?, 5 volts indicating full scale flow of the device. Full scale is the maximum flow for which the mass-flow controller is designed and calibrated to work with at high accuracy. This information is always written on stickers, which are on the top of the cover and the side of the mass-flow stainless steel base. Also written on the sticker is the gas for which the mass-flow controller is calibrated.

Why use a bypass? Because the sensor element can only measure small flow (typically 5 sccm), the bypass/restrictor allows the controller to control and measure greater amounts of flow. On a 5 sccm full scale mass-flow controller, there is no bypass, all of the gas would flow thru the sensor. On a 100 sccm full scale mass-flow controller, the bypass is adjusted so that when 100 sccm flows thru the controller, 5 sccm will flow thru the sensor tube and 95 sccm will flow thru the bypass.

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