Brooks SLA 5800 Mass Flow Controller


The SLA5800 Series features the high accuracy, high zero stability and high repeatability you expect from the industry leader in mass flow measurement and control technology. Engineered with advanced, configurable multi-gas/multi-range capabilities, they offer a better zero drift specification compared to competitive products and have been proven to maintain factory calibration and accuracy longer.


  • Long-term zero stability of <0.2% full scale per year
  • Wide range of flow ratings - from 0.003 up to 2500 lpm
  • Highest pressure ratings - up to 1500 psi/100 bar (optional: 4500 psi/310 bar)


  • Long-term sensor stability reduces maintenance and periodic recalibration requirements, reducing total cost of ownership
  • Proprietary Brooks Instrument thermal sensing technology delivers superior signal to noise performance for improved accuracy at low set points
  • Choose one device platform for different gases and flow ranges
Brooks SLA 5800 Mass Flow Controller