Brooks GF40 Thermal Mass Flow Controller


Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.


  • Programmable multi-gas/multi-range capabilities
  • Sub-1 second flow response time and accuracy of 1% set point for demanding applications
  • Well suited for a variety of gases


  • MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
  • OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
  • Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards