Thermal Mass Flow meter and Mass Flow Controller 4800 Series

Overview

The 4800 Series MEMS-based sensor provides lightning fast response times. The 4800 Series utilizes a Micro Electro Mechanical System (MEMS) based thermal sensor. Similar to typical thermal sensors, it measures a change in temperature to determine mass flow rate. The difference is that gas flows directly across the sensor, achieving extremely fast response times.

Features

  • Fast response time
  • Compact size
  • Optional Local Operator Interface (LOI)
  • Low pressure drop across the sensor
  • Variety of analog and digital I/O
  • Fully RoHS compliant
  • Storage of up to 9 selectable gas calibrations
Thermal Mass Flow meter and Mass Flow Controller 4800 Series