Vapor Delivery Module


Bronkhorst High-Tech BV, manufacturer of mass flow meters and controllers for gases and liquids, designed a new series of Vapor Delivery Modules. These compact sub-systems incorporate a (thermal or Coriolis) liquid flow controller, one or two mass flow controllers for carrier gas and a temperature controlled mixing and evaporation device. The modules are equipped with an 1.8” TFT display and push-buttons for local readout and control. The systems can also be operated via digital communication (RS232 or FLOW-BUS). Optionally, the units can be supplied with an additional mass flow controller for dilution and with local or remote trace heating temperature control. The compact, ‘plug and work’ modules can generate (saturated) vapor flows within the range of 100 sccm up to 10 SLM. The applied Controlled Evaporation Mixing (CEM) technology is suited for atmospheric or vacuum processes and is capable of evaporating mixtures and even solids, dissolved in solvents.VDM-Series vaporizers are ideally suited for vapor deposition and coating processes for the production of semiconductor chips, displays and solar cells. The modules can also be applied for the calibration of analytical devices such as gas chromatographs and mass spectrometers, for anesthetic delivery, and for humidification of fuel cells.



  • Provides accurate and stable vapor (mass) flow
  • Fast response
  • High reproducibility
  • Handles water, solvents, liquid mixtures
  • Flexible selection of gas/liquid ratio
  • Lower working temperature than conventional systems
  • Field proven evaporation method
  • No need for engineering or manufacturing
  • Pre-tested, safe and ready to use
  • Local or remote control (RS232 / FLOW-BUS)
  • Readout/Control panel, incl. 1,8” TFT display, alarm/signaling and counter functions
Vapor Delivery Module