Semiconductor Flow meter


Digital Mass Flow Controller GF135

Oct 17, 2013 1566
Designed for the next step in semiconductor etch, thin film and other advanced process gas control applications, the GF135 combines all of the benefits provided by the most advanced pressure transient insensitive mass flow controller (MFC) and adds real-time flow error detection with advanced diagnostics.

MFC Plus - New

Nov 24, 2016 292
This mass flow meter is designed for full scale flows up to 15,000 sccm. Main features are an unmatched dynamic range and compact size.

Axetris Mass Flow Meter MFM 2150

Jan 11, 2016 347
Compact mass flow meter with RS-485 full duplex interface, based on the proprietary Platinium MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems). It offers the following advantages

Axetris Mass Flow Meter MFM 2250

Nov 24, 2016 626
Small compact mass flow meter module with RS-485 full duplex interface, based on the proprietary Platinium MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems).